Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources
نویسندگان
چکیده
We report a new method for growing hexagonal columnar nanograin structured silicon carbide (SiC) thin films on silicon substrates by using graphene-graphitic carbon nanoflakes (GGNs) templates from solid carbon sources. The growth was carried out in a conventional low pressure chemical vapor deposition system (LPCVD). The GGNs are small plates with lateral sizes of around 100 nm and overlap each other, and are made up of nanosized multilayer graphene and graphitic carbon matrix (GCM). Long and straight SiC nanograins with hexagonal shapes, and with lateral sizes of around 200-400 nm are synthesized on the GGNs, which form compact SiC thin films.
منابع مشابه
A density functional study on the mechanical properties of metal-free two-dimensional polymer graphitic Carbon-Nitride
Successful synthesis of the stable metal-free two-dimensional polymer graphitic carbon-nitride with remarkable properties has made it as one of the most promising nanostructures in many novel nanodevices, especially photocatalytic ones. Understanding the mechanical properties of nanostructures is of crucial importance. Thus, this study employs density functional theory (DFT) to obtain the mecha...
متن کاملA density functional study on the mechanical properties of metal-free two-dimensional polymer graphitic Carbon-Nitride
Successful synthesis of the stable metal-free two-dimensional polymer graphitic carbon-nitride with remarkable properties has made it as one of the most promising nanostructures in many novel nanodevices, especially photocatalytic ones. Understanding the mechanical properties of nanostructures is of crucial importance. Thus, this study employs density functional theory (DFT) to obtain the mecha...
متن کاملSubstrate orientation dependence on the solid phase epitaxial growth rate of Ge
Related Articles A new method for the synthesis of epitaxial layers of silicon carbide on silicon owing to formation of dilatation dipoles J. Appl. Phys. 113, 024909 (2013) Carbon flux assisted graphene layer growth on 6H-SiC(000-1) by thermal decomposition J. Appl. Phys. 113, 014311 (2013) Fabrication of large-grained thin polycrystalline silicon films on foreign substrates by titanium-assiste...
متن کاملFew-layer graphene on SiC, pyrolitic graphite, and graphene: A Raman scattering study
The results of micro-Raman scattering measurements performed on three different “graphitic” materials: micro-structured disks of highly oriented pyrolytic graphite, graphene multi-layers thermally decomposed from carbon terminated surface of 4H-SiC and an exfoliated graphene monolayer are presented. Despite its multi-layer character, most parts of the surface of the graphitized SiC substrates s...
متن کاملMolecular beam growth of graphene nanocrystals on dielectric substrates
We demonstrate the growth of graphene nanocrystals by molecular beam methods that employ a solid carbon source, and that can be used on a diverse class of large area dielectric substrates. Characterization by Raman and Near Edge X-ray Absorption Fine Structure spectroscopies reveal a sp2 hybridized hexagonal carbon lattice in the nanocrystals. Lower growth rates favor the formation of higher qu...
متن کامل